A radiation-sensitive resin composition comprising a quinonediazide-type radiation-sensitive resin and a compound generating an acid upon irradiation. Said radiation-sensitive resin composition can be used as a resist suitable for dry development by plasma etching and enables one to obtain an etching image having high precision with high reproducibility at a high degree of resolution and selectivity.
There is provided an inkjet ink comprising a photo-acid generating agent which is capable of generating an acid as it is irradiated with light, a color component, and an acid-polymerizable compound which can be polymerized in the presence of an acid, wherein at least 40% of the acid-polymerizable solvent is a vinyl ether compound represented by the following general formula (1):
R
13
—R
14
—(R
13
)
p
(1)
(Wherein R
13
(s) is a group selected from the group consisting of a vinyl ether group, a group having a vinyl ether skeleton, an alkoxy group, substituted hydroxyl group and hydroxyl group wherein at least one of R
13
(s) is vinyl ether group or a group having a vinyl ether skeleton, R
14
is a group comprising a substituted or unsubstituted cyclic skeleton and having a valence of (p+1), and p is a positive integer including zero).
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, ACID ETCHING RESISTANCE MATERIAL AND COPOLYMER
申请人:Asakawa Koji
公开号:US20070142592A1
公开(公告)日:2007-06-21
Disclosed is an acid etching resistance material comprising a compound having a repeating unit represented by the following general formula (1):
(in the general formula (1), R
1
is a hydrogen atom or methyl group; R
3
is a cyclic group selected from an alicyclic group and an aromatic group; R
4
is a polar group; R
2
is a group represented by the following general formula (2); and j is 0 or 1):
(in the general formula (2), R
5
is a hydrogen atom or methyl group).
Ink jet recording apparatus
申请人:Hiroki Masashi
公开号:US20080273066A1
公开(公告)日:2008-11-06
An ink jet recording apparatus comprising a color ink container having a capacity V1 accommodating therein a solvent polymerizable in the presence of an acid and a colorant, a reaction liquid container having a capacity V2 (V2
PHOTOSENSITIVE COMPOSITION
申请人:HATTORI Shigeki
公开号:US20090208866A1
公开(公告)日:2009-08-20
A photosensitive composition is provided, which includes a compound expressed by the formula T3 and a photo-acid generator which generates an acid by an action of actinic radiation. In the formula T3, R
3
s are hydrogen atoms and hydrophobic groups. The hydrophobic groups are selected from the group consisting of (AD-1), (AD-2), and (AD-3) shown below, and the hydrogen atoms are partially substituted with a hydrophilic group (LA) shown below.