A radiation sensitive compound prepared by reacting a phenol compound with a quinone diazide sulfonyl halide in a mixture of a solvent having a relative dielectric constant of not larger than 10 and a solvent having a relative dielectric constant of at least 15, which compound is less colored and gives a positive resist composition having a good resolution.
在相对介电常数不大于 10 的溶剂和相对介电常数至少为 15 的溶剂的混合物中,使
苯酚化合物与醌重氮磺
酰卤反应而制备的辐射敏感性化合物,该化合物着色较少,可得到具有良好分辨率的正抗蚀剂组合物。