A positive resist composition comprising a radiation-sensitive component, an alkali-soluble resin and a phenol compound of the formula:
wherein R is a hydrogen atom, a lower alkyl group or a phenyl group, R' is an alkyl group or an alkoxy group, and n is a number of 0 to 3, which has well balanced good properties such as sensitivity, resolution, heat resistance and adhesiveness.
一种阳离子抗蚀剂组合物,由辐射敏感成分、碱溶性树脂和式中的苯酚化合物组成:
其中 R 是氢原子、低级烷基或苯基,R'是烷基或烷氧基,n 是 0 至 3 的数字,它具有良好的平衡特性,如敏感性、分辨率、耐热性和粘合性。
Process for preparing radiation sensitive compound and positive resist composition
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:EP0509431A1
公开(公告)日:1992-10-21
A radiation sensitive compound prepared by reacting a phenol compound with a quinone diazide sulfonyl halide in a mixture of a solvent having a relative dielectric constant of not larger than 10 and a solvent having a relative dielectric constant of at least 15, which compound is less colored and gives a positive resist composition having a good resolution.
A positive type resist composition comprising an alkali-soluble resin and a quinonediazide compound, wherein the alkali-soluble resin containing resin (A) is obtainable through a condensation reaction with at least one phenol compound represented by the following general formula (I):
wherein R₁ to R₃ independently of one another each represent a hydrogen atom or an alkyl or alkoxy group having 1-4 carbon atoms and k represents 1 or 2, at least one compound represented by the following general formula (II):
wherein R₄ represents a hydrogen atom, an alkyl group having 1-4 carbon atoms or a phenyl group, R₅ to R₇ independently of one another each represent a hydrogen atom or an alkyl or alkoxy group having 1-4 carbon atoms and n represents 1 or 2, and an aldehyde compound. This composition is excellent in the balance between performances such as sensitivity, heat resistance and profile, and is free from scum.
CLATHRATE COMPOUND, METHOD OF CONTROLLING CONCENTRATION OF AQUEOUS SOLUTION OF AGRICULTURAL-CHEMICAL ACTIVE INGREDIENT, AND AGRICULTURAL-CHEMICAL PREPARATION