A positive resist composition satisfying high sensitivity, high resolution, good pattern profile and good in-vacuum PED property at the same time, and a pattern forming method using the composition, are provided, which is a positive resist composition comprising: (A) a resin which is insoluble or sparingly soluble in an alkali developer and becomes soluble in an alkali developer under the action of an acid; (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; and (C) an organic basic compound, wherein (A1) a resin containing a repeating unit having a specific structure and (A2) a resin other than the resin (A1) are contained as the resin of the component (A); and a pattern forming method using the composition.
提供了一种满足高灵敏度、高分辨率、良好的图案轮廓和良好的真空PED特性的正性光阻组合物及其图案形成方法,其中该正性光阻组合物包括:(A)一种
树脂,在碱性显影剂中不溶或难溶,在酸的作用下变为可溶于碱性显影剂;(B)一种能够在受到光致辐射时产生酸的化合物;(C)一种有机碱性化合物,其中作为组分(A)的
树脂包含具有特定结构的重复单元的
树脂(A1)和不包含
树脂(A1)的其他
树脂(A2);以及使用该组合物的图案形成方法。