A photoresist composition containing a polymer having a structural unit including an acid-labile group, and a compound represented by the formula (1). In the formula (1), R
1
represents a hydrogen atom or a monovalent acid-labile group. R
2
represents an alicyclic hydrocarbon group having 3 to 20 carbon atoms and a valency of (m+1). m is an integer of 2 to 5. R
3
and R
4
each independently represent a hydrogen atom, a fluorine atom, a monovalent hydrocarbon group having 1 to 20 carbon atoms or a monovalent fluorinated hydrocarbon group having 1 to 20 carbon atoms. n is an integer of 0 to 5. At least two of a plurality of R
1
s optionally taken together represent a ring structure, together with a plurality of oxygen atoms bonding to R
1
and the carbon atom(s) constituting R
2
and bonding to these oxygen atoms. M
+
represents a monovalent radiation-degradable onium cation.
一种光刻胶组合物,包含具有酸敏感基团的结构单元的聚合物和由公式(1)表示的化合物。在公式(1)中,R1表示氢原子或一价酸敏感基团。R2表示具有3至20个碳原子和价态为(m+1)的脂
环烃基团。m为2至5的整数。R3和R4分别独立地表示氢原子、
氟原子、具有1至20个碳原子的一价碳氢基团或具有1至20个碳原子的一价
氟碳基团。n为0至5的整数。至少两个可选的R1中的多个与与这些氧原子结合的R2所构成的碳原子形成环状结构。M+表示一价辐射降解的离子。