PHOTOSENSITIVE RESIN COMPOSITION, CURED FILM, ELEMENT PROVIDED WITH CURED FILM, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
申请人:Toray Industries, Inc.
公开号:EP3203320A1
公开(公告)日:2017-08-09
To provide a photosensitive resin composition which is capable of forming a pattern with high resolution and obtaining a cured film having excellent heat resistance and cracking resistance, and is also alkali developable; and a method capable of shortening the step required to remove a cured film of the composition after formation of an impurity region on a semiconductor substrate; and a method for manufacturing a semiconductor device using the same. Disclosed is a photosensitive resin composition including a polysiloxane (A), wherein the polysiloxane (A) is a polysiloxane represented by the general formula (1), and wherein (X) and (Y) are represented by the general formulas (4) to (6). 7.5≤X≤75 2.5≤Y≤40 1.5×Y≤X≤3×Y
Photosensitive resin composition, cured film, element provided with cured film, and method for manufacturing semiconductor device
申请人:TORAY INDUSTRIES, INC.
公开号:US10409163B2
公开(公告)日:2019-09-10
To provide a photosensitive resin composition which is capable of forming a pattern with high resolution and obtaining a cured film having excellent heat resistance and cracking resistance, and is also alkali developable; and a method capable of shortening the step required to remove a cured film of the composition after formation of an impurity region on a semiconductor substrate; and a method for manufacturing a semiconductor device using the same. Disclosed is a photosensitive resin composition including a polysiloxane (A).
DECOMPOSABLE RESIN COMPOSITION AND PATTERN-FORMING MATERIAL INCLUDING THE SAME
申请人:Taguchi Yoshinori
公开号:US20080070154A1
公开(公告)日:2008-03-20
A decomposable resin composition contains a base generator, and a polyurethane resin capable of being decomposed with a base generated from the base generator.
US7718343B2
申请人:——
公开号:US7718343B2
公开(公告)日:2010-05-18
Photogeneration of organic bases from o-nitrobenzyl-derived carbamates
作者:James F. Cameron、Jean M. J. Frechet
DOI:10.1021/ja00011a038
日期:1991.5
that control their quantum-efficient transformation into free amines or diamines have been investigated. The basic design involves the protection of amines with photolabile [(o-nitrobenzyl)oxy]carbonyl groups or α-substituted analogues. The resulting protected amines owe their light sensitivity to the classical o-nitrobenzyl photorearrangement and cleanly liberate free amine in both the solid state