PHOTOSENSITIVE COMPOSITION, PATTERN-FORMING METHOD USING THE PHOTOSENSITIVE COMPOSITION, AND COMPOUND USED IN THE PHOTOSENSITIVE COMPOSITION
申请人:Fujifilm Corporation
公开号:EP2192134A1
公开(公告)日:2010-06-02
A photosensitive composition ensuring good performance in terms of pattern profile and line edge roughness in normal exposure (dry exposure), immersion exposure and double exposure, a pattern forming method using the photosensitive composition, and a compound for use in the photosensitive composition are provided.
A photosensitive composition comprising: (A) a resin containing a repeating unit corresponding to a compound represented by the following formula (I); the resin being capable of producing an acid group upon irradiation with an actinic ray or radiation: Z-A-X-B-R
wherein Z represents a group capable of becoming an acid group resulting from leaving of a cation upon irradiation with an actinic ray or radiation; A represents an alkylene group; X represents a single bond or a heteroatom-containing divalent linking group; B represents a single bond, an oxygen atom or -N(Rx)-; Rx represents a hydrogen atom or a monovalent organic group; R represents a monovalent organic group substituted by Y; when B represents -N(Rx)-, R and Rx may combine with each other to form a ring; and Y represents a polymerizable group.
本发明提供了一种在正常曝光(干法曝光)、浸泡曝光和双重曝光中均能确保图案轮廓和线边粗糙度性能良好的感光组合物,一种使用该感光组合物的图案形成方法,以及一种用于该感光组合物的化合物。
一种光敏组合物,包括:(A) 一种树脂,其中含有与下式(I)所代表的化合物相对应的重复单元;该树脂在接受辐照时能产生酸基:Z-A-X-B-R
其中,Z 代表能成为酸性基团的基团,该酸性基团是阳离子在接受放 射线或辐射照射时离开阳离子而形成的;A 代表亚烷基;X 代表单键或含杂原子的二价连接基团;B代表单键、氧原子或-N(Rx)-;Rx代表氢原子或一价有机基团;R代表被Y取代的一价有机基团;当B代表-N(Rx)-时,R和Rx可相互结合形成环;Y代表可聚合基团。