Novel polyimide silicone, photosensitive resin composition containing the novel polyimide silicone, and method for pattern formation
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2228400A1
公开(公告)日:2010-09-15
A polyimide silicone having in the molecule a phenolic hydroxy group in which a part or all of hydrogen atoms are substituted with an acid labile group is provided. The polyimide silicone comprises the unit represented by the formula (1):
wherein X is a tetravalent group at least a part of which is a tetravalent organic group represented by the formula (2):
wherein R1 is a monovalent hydrocarbon group, R2 is a trivalent group, and n is an integer of 1 to 120 on average; and Y is a divalent organic group at least a part of which is a divalent organic group having a phenolic hydroxy group in which a part or all of hydrogen atoms are substituted with an acid labile group represented by the formula (3):
wherein R3 and R4 are a hydrogen atom or an alkyl group, and R5 is an alkyl group, an aryl group, or an aralkyl group. R3 and R4, R3 and R5, or R4 and R5 may be bonded to each other to form a ring together with the carbon atom or the carbon atom and the oxygen atom to which they are bonded with the proviso that the R3, R4, and R5 are independently an alkylene group.
本发明提供了一种聚酰亚胺硅氧烷,其分子中的酚羟基部分或全部氢原子被酸性基团取代。该聚酰亚胺有机硅由式(1)所代表的单元组成:
其中 X 是四价基团,至少其中一部分是由式(2)表示的四价有机基团:
其中 R1 是一价烃基,R2 是三价基,n 是平均为 1 至 120 的整数;Y 是二价有机基团,其中至少有一部分是具有酚羟基的二价有机基团,该酚羟基中的部分或全部氢原子被式(3)所代表的易酸基团取代:
其中 R3 和 R4 是氢原子或烷基,R5 是烷基、芳基或芳烷基。R3 和 R4、R3 和 R5 或 R4 和 R5 可以相互键合,与碳原子或碳原子和氧原子一起形成一个环,但 R3、R4 和 R5 必须是独立的亚烷基。