申请人:Brainard Robert L.
公开号:US08501382B1
公开(公告)日:2013-08-06
There are disclosed sulfonic acid precursor compositions, as are methods of using these compositions in, for example, photolithography. Other embodiments are also disclosed.
已披露磺酸前体组合物,以及在例如光刻中使用这些组合物的方法。还披露了其他实施方式。