申请人:Versum Materials US, LLC
公开号:US10294250B2
公开(公告)日:2019-05-21
Organoaminosilanes, such as without limitation di-iso-propylaminosilane (DIPAS), are precursors for the deposition of silicon containing films such as silicon-oxide and silicon-nitride films. Described herein are methods to make organoaminosilane compounds, or other compounds such as organoaminodisilanes and organoaminocarbosilanes, via the catalytic hydrosilylation of an imine by a silicon source comprising a hydridosilane.
有机氨基硅烷,例如但不限于二异丙氨基硅烷(DIPAS),是沉积氧化硅和氮化硅薄膜等含硅薄膜的前体。本文描述了通过包含氢基硅烷的硅源对亚胺进行催化氢硅烷化来制造有机氨基硅烷化合物或其他化合物如有机氨基二硅烷和有机氨基碳硅烷的方法。