[EN] METAL AMIDES OF CYCLIC AMINES<br/>[FR] AMIDES MÉTALLIQUES D'AMINES CYCLIQUES
申请人:HARVARD COLLEGE
公开号:WO2015013630A1
公开(公告)日:2015-01-29
Compounds, and oligomers of the compounds, are synthesized with cyclic amine ligands attached to a metal atom. These compounds are useful for the synthesis of materials containing metals. Examples include pure metals, metal alloys, metal oxides, metal nitrides, metal phosphides, metal sulfides, metal selenides, metal tellurides, metal borides, metal carbides, metal silicides and metal germanides. Techniques for materials synthesis include vapor deposition (chemical vapor deposition and atomic layer deposition), liquid solution methods (sol-gel and precipitation) and solid-state pyrolysis. Suitable applications include electrical interconnects in microelectronics and magnetoresistant layers in magnetic information storage devices. The films have very uniform thickness and high step coverage in narrow holes.
含有环胺配体的化合物及其低聚物通过连接到金属原子进行合成。这些化合物对于合成含有金属的材料非常有用。例如包括纯金属、金属合金、金属氧化物、金属氮化物、金属磷化物、金属硫化物、金属硒化物、金属碲化物、金属硼化物、金属碳化物、金属硅化物和金属锗化物。材料合成技术包括气相沉积(化学气相沉积和原子层沉积)、液相溶液方法(溶胶-凝胶和沉淀)和固态热解。适用的应用领域包括微电子中的电气互连和磁性信息存储设备中的磁阻层。这些薄膜具有非常均匀的厚度,在狭窄的孔中具有高台阶覆盖率。