CYCLIC COMPOUND, MANUFACTURING METHOD THEREFOR, RADIATION-SENSITIVE COMPOSITION, AND METHOD FOR FORMING A RESIST PATTERN
申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:EP2474565A1
公开(公告)日:2012-07-11
A cyclic compound represented by formula (1):
wherein L, R1, R', and m are as defined in the specification. The cyclic compound of formula (1) is highly soluble to a safety solvent, highly sensitive, and capable of forming resist patterns with good profile. Therefore, the cyclic compound is useful as a component of a radiation-sensitive composition.
式 (1) 所代表的环状化合物:
其中 L、R1、R'和 m 如说明书中所定义。式(1)的环状化合物对安全溶剂的溶解度高,灵敏度高,能形成具有良好轮廓的抗蚀图案。因此,该环状化合物可用作辐射敏感组合物的成分。