申请人:——
公开号:US20030059710A1
公开(公告)日:2003-03-27
A monomer containing an electron-withdrawing group of the present invention is represented by following Formula (a), (b) or (c):
1
wherein A
1
, A
2
, and A
3
are each a ring; R
a
, R
b
, R
c
, and R
u
are the same or different and are each a hydrogen atom or organic group; at least one of R
s
, R
w
and R
v
, at least one of R
t
and R
w1
, and at least one of the two R
w2
s are each an electron-withdrawing group, and the others are each a hydrogen atom or organic group; W
1
is a single bond or linkage group; and n denotes an integer of 2 to 25, where at least two of R
a
, R
b
, R
c
, R
s
, R
t
, R
u
, R
v
, R
w
, R
w1
, R
w2
, W
1
, and carbon atoms constituting ring A
1
, carbon atoms constituting ring A
2
, and carbon atoms constituting ring A
3
may be combined to form a ring, respectively. The electron-withdrawing groups in R
s
, R
t
, R
v
, R
w
, R
w1
, and R
w2
are, for example, groups each containing a fluorine atom. The monomer is useful as a raw material for photoresist polymeric compounds.
本发明的含有电子吸引基团的单体由以下化学式(a)、(b)或(c)表示:其中A1、A2和A3各自为一个环;Ra、Rb、Rc和Ru相同或不同,各自为氢原子或有机基团;Rs、Rw和Rv中至少有一个,Rt和Rw1中至少有一个,两个Rw2中至少有一个为电子吸引基团,其他的为氢原子或有机基团;W1为单键或连接基团;n表示2到25的整数,其中至少有两个Ra、Rb、Rc、Rs、Rt、Ru、Rv、Rw、Rw1、Rw2、W1和构成环A1的碳原子、构成环A2的碳原子以及构成环A3的碳原子可以分别结合形成一个环。 Rs、Rt、Rv、Rw、Rw1和Rw2中的电子吸引基团,例如,是每个含有氟原子的基团。该单体可用作光刻胶聚合物化合物的原材料。