To provide a negative photosensitive resin composition which exhibits satisfactory resolution even when shifts occur in focus depth, and which has satisfactory adhesion to a mold resin and exhibits a low dielectric constant; a method for producing a polyimide using the photosensitive resin composition; a method for producing a cured relief pattern; and a semiconductor device including the cured relief pattern.
Disclosed is a negative photosensitive resin composition including a polyimide precursor having a structure represented by general formula (A1), (B) a photopolymerization initiator, and (C) a solvent.
提供一种负感光
树脂组合物,该组合物即使在聚焦深度发生偏移时也能表现出令人满意的分辨率,并且与模具
树脂具有令人满意的粘附性,并表现出较低的介电常数;提供一种使用该感光
树脂组合物生产聚
酰亚胺的方法;提供一种生产固化浮雕图案的方法;以及提供一种包括固化浮雕图案的半导体器件。
本发明公开了一种阴性光敏
树脂组合物,该组合物包括具有通式(A1)表示的结构的聚
酰亚胺前体、(B)光聚合
引发剂和(C)溶剂。