ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE COMPOSITION, AND RESIST FILM, RESIST-COATED MASK BLANKS, RESIST PATTERN FORMING METHOD AND PHOTOMASK EACH USING THE COMPOSITION
申请人:FUJIFILM CORPORATION
公开号:US20150010855A1
公开(公告)日:2015-01-08
There is provided an actinic ray-sensitive or radiation-sensitive composition containing (α) a compound represented by the formula (αI) capable of generating an acid having a size of 200 Å
3
or more in volume and (β) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, and the formula (αI) is defined as herein,
and a resist film formed using the actinic ray-sensitive or radiation-sensitive composition, a resist-coated mask blanks coated with the resist film, a resist pattern forming method comprising exposing the resist film and developing the exposed film, a photomask obtained by exposing and developing the resist-coated mask blanks, a method for manufacturing an electronic device, comprising the resist pattern forming method and an electronic device manufactured by the manufacturing method of an electronic device.
提供一种感光或辐射敏感的组合物,其中包含(α)一种化合物,其由公式(αI)表示,能够产生大小为200Å3或更大的体积的酸,以及(β)一种化合物,能够在受到光辐射或辐射时产生酸,公式(αI)的定义如本文所述。还提供了使用该感光或辐射敏感组合物形成的光阻膜,涂有光阻膜的光阻涂层掩模坯料,包括曝光光阻膜和显影曝光后膜的光阻图案形成方法,通过曝光和显影涂有光阻涂层的掩模坯料获得的光掩模,以及一种电子器件的制造方法,包括光阻图案形成方法和制造电子器件的电子器件制造方法,以及通过该电子器件制造方法制造的电子器件。