Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film and method of forming pattern
申请人:FUJIFILM Corporation
公开号:US10234759B2
公开(公告)日:2019-03-19
Provided is an actinic-ray- or radiation-sensitive resin composition including a resin (A) and any of compounds (B) of general formula (I) below. (In general formula (I), Rf represents a fluorine atom or a monovalent organic group containing at least one fluorine atom; R1 represents a hydrogen atom or a monovalent substituent containing no fluorine atom; X1 represents a monovalent organic group having at least two carbon atoms, or a methyl group in which a substituent other than a fluorine atom is optionally introduced, provided that X1 may be bonded to R1 to thereby form a ring; and Z represents a moiety that when exposed to actinic rays or radiation, is converted to a sulfonic acid group, an imidic acid group or a methide acid group).
本发明提供了一种对辐照或辐射敏感的树脂组合物,该组合物包括树脂(A)和以下通式(I)的任何化合物(B)。(在通式(I)中,Rf 代表氟原子或含有至少一个氟原子的一价有机基团;R1 代表氢原子或不含氟原子的一价取代基;X1 代表至少含有两个碳原子的一价有机基团,或可选择引入氟原子以外的取代基的甲基,条件是 X1 可与 R1 键合,从而形成一个环;以及 Z 代表当暴露于放热射线或辐射时会转化为磺酸基团、酰亚胺酸基团或甲酰胺酸基团的分子)。