Photosensitive compounds, photosensitive resin compositions, and pattern formation method making use of the compounds or compositions
申请人:Toyo Gosei Kogyo Co., Ltd.
公开号:EP0878739A1
公开(公告)日:1998-11-18
The photosensitive compound of the present invention contains the following unit:
and is particularly expressed by the following formula:
Different photosensitive resin compositions can be prepared from this novel photosensitive resin compound, and the thus-obtained photosensitive resin compositions do not raise the problem of environmental pollution, are endowed with high resolution, possess a high level of sensitivity, and exhibit excellent adhesion with substrates, coating characteristics, and storage stability.
本发明的光敏化合物含有以下单元:
并特别用下式表示:
用这种新型光敏树脂化合物可以制备出不同的光敏树脂组合物,由此获得的光敏树脂组合物不会产生环境污染问题,具有高分辨率、高灵敏度,并且与基底的附着力、涂层特性和储存稳定性都很好。