RESIST UNDERLAYER FILM COMPOSITION AND PATTERNING PROCESS USING THE SAME
申请人:OGIHARA Tsutomu
公开号:US20120184103A1
公开(公告)日:2012-07-19
There is disclosed a resist underlayer film composition, wherein the composition contains a polymer obtained by condensation of, at least, one or more compounds represented by the following general formulae (1-1) and/or (1-2), and one or more kinds of compounds, represented by the following general formulae (2-1) and/or (2-2), and/or equivalent bodies thereof. There can be provided an underlayer film composition, especially for a trilayer resist process, that can form an underlayer film having reduced reflectance, (namely, an underlayer film having optimum n-value and k-value as an antireflective film), excellent filling-up properties, high pattern-antibending properties, and not causing line fall or wiggling after etching especially in a high aspect line that is thinner than 60 nm, and a patterning process using the same.
US8853031B2
申请人:——
公开号:US8853031B2
公开(公告)日:2014-10-07
African trypanosomiasis: Synthesis & SAR enabling novel drug discovery of ubiquinol mimics for trypanosome alternative oxidase
作者:Ryan A. West、Oran G. O'Doherty、Trevor Askwith、John Atack、Paul Beswick、Jamie Laverick、Michael Paradowski、Lewis E. Pennicott、Srinivasa P.S. Rao、Gareth Williams、Simon E. Ward
DOI:10.1016/j.ejmech.2017.09.067
日期:2017.12
millions of livestock animals in sub-Saharan Africa every year. Current treatments are limited, difficult to administer and often toxic causing long term injury or death in many patients. Trypanosome alternative oxidase is a parasite specific enzyme whose inhibition by the natural product ascofuranone (AF) has been shown to be curative in murine models. Until now synthetic methods to AF analogues have been