申请人:Sumitomo Chemical Company, Limited
公开号:EP3556783A1
公开(公告)日:2019-10-23
Disclosed is a resin comprising a structural unit derived from a compound represented by formula (I) and a structural unit having an acid-labile group:
wherein R1 represents a hydrocarbon group which may have a substituent, R2 each independently represent an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom, Ar represents an aromatic hydrocarbon group which may have a substituent, L1 represents a group represented by formula (L1-1), etc., L11, L13, L15 and L17 each independently represent an alkanediyl group, L12, L14, L16 and L18 each independently represent -O-, -CO-, -CO-O-, etc., * and ** are bonds, and ** represents a bond to an iodine atom.
本发明公开了一种树脂,该树脂包含由式 (I) 所示化合物衍生的结构单元和具有酸亲和基的结构单元:
其中 R1 代表可具有取代基的烃基;R2 各自独立地代表可具有卤素原子、氢原子或卤素原子的烷基;Ar 代表可具有取代基的芳香烃基;L1 代表式 (L1-1) 所代表的基团等、L11、L13、L15和L17各自独立地代表烷二基,L12、L14、L16和L18各自独立地代表-O-、-CO-、-CO-O-等,*和**为键,**代表与碘原子的键。