Negative-working resist composition for electron beams or X-rays
申请人:FUJI PHOTO FILM CO., LTD.
公开号:US20020192592A1
公开(公告)日:2002-12-19
A negative-working resist composition for electron beams or X-rays comprising (A) a compound generating a sulfonic acid by the irradiation of electron beams or x-rays, (B) a resin which is insoluble in water and soluble in an alkali aqueous solution, (C) a crosslinking agent crosslinking with the resin (B) by the action of an acid, and (D) a compound generating a carboxylic acid having a specific structure by the irradiation of electron beams or x-rays.
A negative planographic printing plate precursor for heat-mode exposure systems, which has, on a support, a photosensitive layer containing: (A) a light-to-heat conversion agent; (B) a polymerizable unsaturated group-having compound; and (C) an onium salt having a counter anion with a valency of at least 2. The precursor is capable of being exposed with an IR laser for image formation thereon. The onium salt may be, for example, a diazonium salt, iodonium salt or sulfonium salt. The counter anion has at least two anionic sites which may be the same or different, and the anionic structure is preferably divalent to hexavalent.
Resist composition for electron beam, EUV or X-ray
申请人:FUJI PHOTO FILM CO., LTD.
公开号:US20030198894A1
公开(公告)日:2003-10-23
A resist composition for an electron beam, EUV or X-ray comprising (A1) a compound that has a reduction potential higher than that of diphenyl iodonium salt and generates an acid upon irradiation of an actinic ray or radiation.
Chemical amplification type negative-working resist composition for electron beams or X-rays
申请人:——
公开号:US20010036590A1
公开(公告)日:2001-11-01
A negative-working chemical amplification-type resist composition for electron beams or X-rays satisfying the characteristics of the sensitivity and resolution•resist pattern for the use of electron beams or X-rays is provided. The chemical amplification-type negative-working resist composition contains (1) an alkali-soluble resin having a weight-average molecular weight of exceeding 3,000 and not larger than 1,000,000, (2) a crosslinking agent causing crosslinkage by an acid, and (3) a compound generating an acid by the irradiation of electron beams or X-rays, wherein the alkali-soluble resin has a specific structure.
A positive photosensitive composition comprising (A1) a compound that generates an aromatic sulfonic acid substituted with at least one fluorine atom and/or a group having at least one fluorine atom upon irradiation of an actinic ray or radiation, (B) a resin that has a monocyclic or polycyclic alicyclic hydrocarbon structure and is decomposed by the action of an acid to increase solubility in an alkali developing solution, and (C) a compound that has at least three hydroxy or substituted hydroxy groups and at least one cyclic structure or (A2) an onium salt of an alkanesulfonic acid in which the &agr;-position of the sulfonic acid is not substituted with a fluorine atom and/or an onium salt of a carboxylic acid.