A negative-working chemical amplification-type resist composition for electron beams or X-rays satisfying the characteristics of the sensitivity and resolution•resist pattern for the use of electron beams or X-rays is provided. The chemical amplification-type negative-working resist composition contains (1) an alkali-soluble resin having a weight-average molecular weight of exceeding 3,000 and not larger than 1,000,000, (2) a crosslinking agent causing crosslinkage by an acid, and (3) a compound generating an acid by the irradiation of electron beams or X-rays, wherein the alkali-soluble resin has a specific structure.
提供一种适用于电子束或X射线的负性
化学增强型光阻组合物,满足灵敏度和分辨率的特性,用于电子束或X射线的光阻图案。该
化学增强型负性光阻组合物包含(1)一种重量平均分子量超过3,000但不大于1,000,000的碱溶性
树脂,(2)一种通过酸引起交联的
交联剂,以及(3)一种通过电子束或X射线辐射产生酸的化合物,其中碱溶性
树脂具有特定结构。