A composition comprising group 2 imidazolate compounds which are coordinated to suitable neutral donor ligand molecules to provide group 2 metal complexes that are highly soluble in hydrocarbon solvents. In one embodiment, the composition is used for the direct liquid injection delivery of the group 2 precursor to the chamber of an ALD or CVD chamber for the deposition of group 2 containing thin films such as, for example, STO and BST films.
一种由 2 族
咪唑酸盐化合物组成的组合物,该化合物与合适的中性供体
配体分子配位,以提供高度溶于烃类溶剂的 2 族
金属络合物。在一个实施方案中,该组合物用于将 2 族前驱体直接液注输送到 ALD 或 CVD 室的腔室中,以沉积含有 2 族的薄膜,例如
STO 和 B
ST 薄膜。