Provided are novel symmetrical and asymmetrical bifunctional photodecomposable bases (PDBs) with dicarboxylate anion groups that show increased imaging performance. Also provided are photoresist compositions prepared with the bifunctional dicarboxylated PDBs and lithography methods that use the photoresist compositions of the present invention.
本发明提供了具有二元
羧酸根离子基团的新型对称和非对称双功能光分解碱(PDBs),其显示出增强的成像性能。还提供了使用双功能二羧化PDBs制备的光刻胶组合物和使用本发明的光刻胶组合物的光刻方法。