申请人:Semiconductor Energy Laboratory Co., Ltd.
公开号:US20030010283A1
公开(公告)日:2003-01-16
A first pressure generating chamber, which is sealed by a first elastic plate mounted with a first piezoelectric element at one surface, and a second pressure generating chamber, which is sealed by a second elastic plate mounted with a second piezoelectric element at one surface are formed in a casing. The second pressure generating chamber is formed with an opening which is a discharge port. A mixture is discharged from the discharge port. A nozzle formed with an opening jets gas toward a substrate surface, and is provided in the vicinity of the discharge port of the ink head.
第一压力发生室和第二压力发生室分别形成于一个外壳中,第一压力发生室由一个表面安装有第一压电元件的第一弹性板密封,第二压力发生室由一个表面安装有第二压电元件的第二弹性板密封。第二压力产生室带有一个开口,该开口是一个排放口。混合物从排气口排出。墨头的出料口附近设有一个喷嘴,喷嘴开口将气体喷射到基板表面。