RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE SAME
申请人:MAKINO Masaomi
公开号:US20080193878A1
公开(公告)日:2008-08-14
A resist composition includes: (A) a resin containing a repeating unit having a specific secondary benzyl structure; and (B) a compound capable of generating an acid upon irradiation with actinic rays or radiation, and a pattern forming method using the composition.