The series of nickel dichalcogenoimidodiphosphinates [NiiPr2P(X1)NP(X2)iPr2}2]: X1 = S, X2 = Se (1), X1 = X2 = S (2), and X1 = X2 = Se (3) have been successfully used as single-source precursors (SSPs) to deposit thin films of nickel sulfide, selenide or phosphide; the material deposited depended on both temperature and method used for the deposition. Aerosol-assisted (AA) chemical vapour deposition (CVD) and low-pressure (LP) CVD were used. The as-deposited films were characterised by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX) and X-ray photoelectron spectroscopy (XPS). A variety of phases including: Ni2P, Ni0.85Se and NiS1.03 were deposited under different conditions. The mechanism of decomposition to the phosphide, selenide, or sulfide was studied by pyrolysis gas chromatography mass spectrometry (Py-GC-MS) and modelled by density functional theory (DFT).
                                    镍二
硫代亚
磷酰胺
二膦酸盐(NiiPr2P(X1)NP(X2)iPr2}2)系列:X1 = S、X2 = 
SE(1)、X1 = X2 = S(2)和X1 = X2 = 
SE(3)已成功用作沉积
硫化镍、
硒化镍或
磷化镍薄膜的单源前驱体(S
SPs);沉积的材料取决于沉积温度和沉积方法。使用了气溶胶辅助(
AA)
化学气相沉积(CVD)和低压(LP)CVD。沉积薄膜的表征方法包括X射线衍射(XRD)、扫描电子显微镜(
SEM)、能量色散X射线光谱(EDX)和X射线光电子能谱(XPS)。在不同的条件下沉积了多种相,包括:
Ni2P、Ni0.85
SE和NiS1.03。通过热解气相色谱质谱(Py-GC-MS)研究了
磷化物、
硒化物或
硫化物的分解机理,并通过密度泛函理论(DFT)进行了建模。