申请人:Sumitomo Chemical Company, Limited
公开号:US05866724A1
公开(公告)日:1999-02-02
A positive photoresist compositions comprising, as a photosensitizer, a quinonediazide sulfonic acid ester of a phenol compound represented by the following formula (I): ##STR1## wherein Q.sup.1, Q.sup.2, Q.sup.3, Q.sup.4, Q.sup.5, Q.sup.6, Q.sup.7, Q.sup.8, Q.sup.9 and Q.sup.10 independently represent hydrogen, alkyl having 1-6 carbon atoms or phenyl, or Q.sup.1 and Q.sup.2, Q.sup.3 and Q.sup.4, Q.sup.5 and Q.sup.6, Q.sup.7 and Q.sup.8, or Q.sup.9 and Q.sup.10 may form a cycloalkane ring having 6 or less carbon atoms together with a carbon atoms to which they are connected, R.sup.1, R.sup.2, R.sup.3, R.sup.4, R.sup.5, R.sup.6, R.sup.7, R.sup.8, R.sup.9, R.sup.10, R.sup.11, R.sup.12, R.sup.13, R.sup.14, R.sup.15 and R.sup.16 independently represent hydrogen, hydroxyl, alkyl having 1-6 carbon atoms or phenyl; and m and n independently represent a number of 0 or 1; and an alkali soluble resin; and a quinonediazide sulfonic acid ester of a phenol compound of formula (I).
一种正光刻胶组合物,包括以下式子(I)所代表的
酚化合物的
喹喔啉二酮
磺酸酯作为光敏剂:
##STR1##
其中,Q1,Q2,Q3,Q4,Q5,Q6,Q7,Q8,Q9和Q10分别独立地代表氢、具有1-6个碳原子的烷基或苯基,或者Q1和Q2、Q3和Q4、Q5和Q6、Q7和Q8、或Q9和Q10可以与它们连接的碳原子一起形成具有6个或更少碳原子的环烷基;R1,R2,R3,R4,R5,R6,R7,R8,R9,R10,R11,R12,R13,R14,R15和R16分别独立地代表氢、羟基、具有1-6个碳原子的烷基或苯基;m和n分别独立地表示0或1;以及一种碱溶性
树脂;和一种具有式子(I)的
酚化合物的
喹喔啉二酮
磺酸酯。