Polymer composition, hardmask composition having antireflective properties, and associated methods
申请人:Cheon Hwan Sung
公开号:US20090176165A1
公开(公告)日:2009-07-09
A polymer composition includes an aromatic ring-containing polymer represented by Formula 1:
wherein m and n satisfy the relations 1≦m<190, 0≦n<190, and 1≦m+n<190.