Disclosed is a top coating composition formed on a resist film, for protecting the resist film, the top coating composition being a top coating composition for photoresist, characterized by containing a fluorine-containing polymer having a repeating unit represented by the following general formula (1). This composition is capable of controlling developing solution solubility and has a high water repellency.
[In the formula, R
1
represents a hydrogen atom, fluorine atom, methyl group or trifluoromethyl group, R
2
represents a heat-labile protecting group, R
3
represents a fluorine atom or fluorine-containing alkyl group, and W is a bivalent linking group.]
本发明公开了一种用于保护光阻膜的顶层涂层组合物,该顶层涂层组合物是一种用于光刻胶的顶层涂层组合物,其特征在于包含具有以下一般式(1)所表示的重复单元的含
氟聚合物。该组合物能够控制显影液的溶解性,并具有高度的防
水性。[在公式中,R1表示氢原子、
氟原子、甲基基团或三
氟甲基基团,R2表示热敏保护基团,R3表示
氟原子或含氟烷基团,W是双价连接基团。]