申请人:——
公开号:US04481340A1
公开(公告)日:1984-11-06
A photosensitive polyamic acid derivative obtained by treating polyamic acid with a compound of the formula (1), compound of formula (1), method of manufacturing a substrate having a polyimide layer by providing the substrate with a layer of the photosensitive polyamic acid derivative and then exposing, developing and imidizing the layer, as well as a semiconductor device comprising a polyimide layer obtained by using the above-mentioned method.
通过使用公式(1)的化合物处理聚酰亚胺酸而得到的一种光敏聚酰亚胺酸衍生物,使用该光敏聚酰亚胺酸衍生物在基板上形成一层,并经过曝光、显影和缩酰化处理,从而制造具有聚酰亚胺层的基板的方法,以及通过使用上述方法获得的聚酰亚胺层的半导体器件。