HYDRIDOSILAPYRROLES, HYDRIDOSILAAZAPYRROLES, THIASILACYCLOPENTANES, METHOD FOR PREPARATION THEREOF, AND REACTION PRODUCTS THEREFROM
申请人:Gelest Technologies, Inc.
公开号:US20180030071A1
公开(公告)日:2018-02-01
Hydridosilapyrroles and hydridosilaazapyrrole are a new class of heterocyclic compounds having a silicon bound to carbon and nitrogen atoms within the ring system and one or two hydrogen atoms on the silicon atom. The compounds have formula (I):
in which R is a substituted or unsubstituted organic group and R′ is an alkyl group. These compounds react with a variety of organic and inorganic hydroxyl groups by a ring-opening reaction and may be used to produce silicon nitride or silicon carbonitride films.