A polymer comprising recurring units derived from vinylanthraquinone, recurring units containing a benzene ring having a hydroxyl-bearing tertiary alkyl group bonded thereto, and recurring units derived from hydroxystyrene is provided. The polymer is used as a base resin to formulate a negative resist composition having a high resolution and minimal LER.
本发明提供了一种聚合物,它包含由
乙烯基蒽醌衍生的递归单元、含有苯环的递归单元(苯环上键合有含羟基的叔烷基)以及由羟基
苯乙烯衍生的递归单元。这种聚合物可用作基础
树脂,配制出具有高分辨率和最小 LER 的负向抗蚀剂组合物。