A resist composition comprises (A) at least two kinds of resins each of which decomposes by the action of an acid to undergo an increase in its solubility for an alkali developer, wherein at least one kind of the resins (A) is a resin synthesized by living radical polymerization using a chain transfer agent represented by formula (I):
wherein:
A represents an organic group not containing hetero atoms; and
Y represents an organic group capable of releasing a radical.
一种抗蚀性组合物包括(A)至少两种
树脂,每种
树脂通过酸的作用分解,以增加其对碱性显影剂的溶解度,其中至少一种
树脂(A)是通过使用由式(I)表示的链转移剂合成的活性自由基聚合
树脂:其中:A代表不含杂原子的有机基团;Y代表能够释放自由基的有机基团。