A positive-type photosensitive resin composition includes (A) an alkali-soluble resin, (B) a photosensitizer, and (C) a silicon compound shown by the following general formula (1).
wherein R1 represents an alkylene group having 5 to 30 carbon atoms or an organic group that includes at least one aromatic ring, and R2 represents an alkyl group having 1 to 10 carbon atoms. The positive-type photosensitive resin composition exhibits excellent storage stability, produces a film that exhibits excellent adhesion to a substrate during development, and produces a cured film that exhibits excellent adhesion to a substrate after humidification.
一种正型光敏
树脂组合物包括(A)碱溶性
树脂、(B)光敏剂和(C)如下通式(1)所示的
硅化合物。
其中 R1 代表具有 5 至 30 个碳原子的亚烷基或至少包括一个芳香环的有机基团,R2 代表具有 1 至 10 个碳原子的烷基。正型感光
树脂组合物具有极佳的储存稳定性,在显影过程中生成的薄膜与基底具有极佳的附着力,在加湿后生成的固化薄膜与基底具有极佳的附着力。