FLUORINATED CYCLOOLEFIN POLYMERS, PROCESSES FOR PREPARATION OF FLUORINATED CYCLOOLEFIN MONOMERS AND POLYMERS THEREOF, AND USE OF THE SAME
申请人:Mitsui Chemicals, Inc.
公开号:EP1298156A1
公开(公告)日:2003-04-02
The present invention is to provide a fluorine-containing polymer having excellent light transmission in the vacuum ultraviolet region of not more than 193 nm, a monomer favorably used for preparing the fluorine-containing polymer, a process for preparing the fluorine-containing polymer, and uses of the fluorine-containing polymer. The fluorine-containing polymer has at least a repeated unit structure represented by the following formula (1) and has an absorption coefficient of not more than 3.0 µm-1 at 157 nm of ultraviolet rays.
wherein R1 to R12 are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, or the like; X1 is -CRaRb-, -NRa- or -PRa- (Ra and Rb are each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, hydrogen, -O-, -S-, an alkyl group of 1 to 20 carbon atoms, or the like); at least one of R1 to R12 and X1 is fluorine or a fluorine-containing group; and n is 0 or an integer of 1 to 3.
本发明旨在提供一种在不超过 193 纳米的真空紫外线区域具有优异透光性的含氟聚合物、一种可用于制备该含氟聚合物的单体、一种制备该含氟聚合物的工艺以及该含氟聚合物的用途。含氟聚合物至少具有下式(1)所代表的重复单元结构,并且在 157 纳米紫外线下的吸收系数不超过 3.0 µm-1。
其中 R1 至 R12 分别是氟、1 至 20 个碳原子的含氟烷基或类似物;X1 是-CRaRb-、-NRa- 或-PRa-(Ra 和 Rb 分别是氟、1 至 20 个碳原子的含氟烷基、氢、-O-、-S-、1 至 20 个碳原子的烷基或类似物);R1 至 R12 和 X1 中至少有一个是氟或含氟基团;以及 n 是 0 或 1 至 3 的整数。