HIGH-PURITY 1,3-PROPANEDIOL DERIVATIVE SOLVENT, PROCESS FOR PRODUCING THE SAME, AND USE THEREOF
申请人:DAICEL CHEMICAL INDUSTRIES, Ltd.
公开号:EP1085003A1
公开(公告)日:2001-03-21
The present invention No. I is to obtain a high purity 3-alkoxy-1-propanol having the content of alcoholic impurities of not more than 0.3% by weight by allowing to react acrolein with a linear or branched alcohol having a carbon number of 1-4 using acrolein having the content of propionaldehyde of not more than 1% by weight as a raw material, a 3-alkoxy-1-propanol is produced by a hydrogenation reaction using hydrogen of a reaction mass under the presence of a catalyst, followed by recovering through a distillation of the 3-alkoxy-1-propanol having the content of alcoholic impurities of not more than 0.3% by weight from a crude solution in the hydrogenation reaction.
The present invention No. II is a cleaning agent for a lithography which is a solvent (a) alone which includes a 1,3-propanediol alkylether, a 1,3-propanediol alkylether acetate, or a mixture thereof and, further, in which there are employed together the alcohols (b) having a carbon number of 1-4 and propylene glycol methylether acetate.
The present invention No. III is a rinsing liquid for lithography which comprises a homogeneous solution containing the solvent (a) and water.
The present invention No. IV is to employ the solvent (a) as a solvent for a resist composition, and it is a resist composition composed of the solvent for a resist composition and a component for a resist.
The present invention No. V is composed of the solvent (a), and a modified copolymer in which an epoxy group-contained unsaturated compound having an aliphatic structure is added to carboxylic groups in a copolymer of a copolymerizable unsaturated carboxylic acid with an unsaturated compound other than the unsaturated carboxylic acid.
本发明第 I 号是以丙醛含量不超过 1%(重量百分比)的丙烯醛为原料,使丙烯醛与碳原子数为 1-4 的直链或支链醇反应,得到酒精杂质含量不超过 0.3%(重量百分比)的高纯度 3-烷氧基-1-丙醇。以丙醛含量不超过 1%(按重量计)的丙烯醛为原料,使丙烯醛与碳原子数为 1-4 的直链或支链醇反应,在催化剂存在下利用反应物的氢进行氢化反应生成 3-烷氧基-1-丙醇,然后通过蒸馏从氢化反应的粗溶液中回收酒精杂质含量不超过 0.3%(按重量计)的 3-烷氧基-1-丙醇。
本发明 II 是一种用于平版印刷的清洗剂,它是一种单独的溶剂(a),其中包括 1,3-丙二醇烷基醚、1,3-丙二醇烷基醚乙酸酯或它们的混合物,此外,其中还同时使用了碳原子数为 1-4 的醇类(b)和丙二醇甲醚乙酸酯。
本发明 III 是一种用于光刻的漂洗液,它由含有溶剂(a)和水的均质溶液组成。
本发明 IV 是将溶剂(a)用作抗蚀剂组合物的溶剂,它是由抗蚀剂组合物溶剂和抗蚀剂组分组成的抗蚀剂组合物。
本发明 V 由溶剂(a)和一种改性共聚物组成,其中在可共聚的不饱和羧酸与不饱和羧酸以外的不饱和化合物的共聚物中的羧基上添加了具有脂肪族结构的含环氧基团的不饱和化合物。