CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN
申请人:Echigo Masatoshi
公开号:US20140308615A1
公开(公告)日:2014-10-16
A cyclic compound having a molecular weight of 500 to 5000 is represented by the following formula (1),
wherein at least one of R
0
is a monovalent group containing an iodine atom. Also disclosed are a method for producing the cyclic compound, a composition containing the cyclic compound, and a method for forming a resist pattern using the composition.