An orthogonal process for photolithographic patterning organic structures is disclosed. The disclosed process utilizes fluorinated solvents or supercritical CO
2
as the solvent so that the performance of the organic conductors and semiconductors would not be adversely affected by other aggressive solvent. One disclosed method may also utilize a fluorinated photoresist together with the HFE solvent, but other fluorinated solvents can be used. In one embodiment, the fluorinated photoresist is a resorcinarene, but various fluorinated polymer photoresists and fluorinated molecular glass photoresists can be used as well. For example, a copolymer perfluorodecyl methacrylate (FDMA) and 2-nitrobenzyl methacrylate (NBMA) is a suitable orthogonal fluorinated photoresist for use with fluorinated solvents and supercritical carbon dioxide in a photolithography process. The combination of the fluorinated photoresist and the fluorinated solvent provides a robust, orthogonal process that is yet to be achieved by methods or devices known in the art.
本文介绍了一种用于光刻有机结构的正交工艺。该工艺利用
氟化溶剂或超临界
CO2作为溶剂,以使有机导体和半导体的性能不受其他侵蚀性溶剂的不利影响。其中一种方法还可以使用
氟化光阻与HFE溶剂结合使用,但也可以使用其他
氟化溶剂。在一种实施例中,
氟化光阻是一种
二苯并呋喃酮,但也可以使用各种
氟化聚合物光阻和
氟化分子
玻璃光阻。例如,一种共聚物
全氟癸基
甲基丙烯酸酯(FDMA)和
2-硝基苯甲酸甲酯(N
BMA)是用于与
氟化溶剂和超临界
二氧化碳在光刻工艺中使用的适用于正交的
氟化光阻。
氟化光阻和
氟化溶剂的组合提供了一种强大的正交工艺,这种工艺尚未被已知的方法或设备实现。