Photoresist underlayer film-forming composition and pattern forming process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2813890A2
公开(公告)日:2014-12-17
In lithography, a composition comprising a novolak resin comprising recurring units derived from a naphtholphthalein is used to form a photoresist underlayer film. The underlayer film is strippable in alkaline water, without causing damage to ion-implanted Si substrates or SiO2 substrates.
Underlayer film-forming composition and pattern forming process
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US10228621B2
公开(公告)日:2019-03-12
In lithography, a composition comprising a novolak resin comprising recurring units derived from a phenolphthalein, Phenol Red, Cresolphthalein, Cresol Red, or Thymolphthalein is used to form a photoresist underlayer film. The underlayer film is strippable in alkaline water, without causing damage to ion-implanted Si substrates or SiO2 substrates.
MANUFACTURING METHOD FOR FLUORINE-CONTAINING SULFONYL IMIDE SALT
申请人:Nippon Soda Co., Ltd.
公开号:EP2662332B1
公开(公告)日:2018-03-28
Photoresist underlayer film-forming composition and pattern forming processes
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP2813890B1
公开(公告)日:2018-05-30
PROCESS FOR PRODUCING FLUORINE-CONTAINING SULFONYLIMIDE SALT
申请人:Tsubokura Shiro
公开号:US20130323155A1
公开(公告)日:2013-12-05
By reacting a fluorine-containing sulfonylimide ammonium salt such as ammonium N,N-di(fluorosulfonyl)imide with an alkali metal hydroxide such as lithium hydroxide, potassium hydroxide or sodium hydroxide under reduced pressure and at a low temperature of approximately 40° C., a fluorine-containing sulfonylimide alkali metal salt such as lithium N,N-di(fluorosulfonyl)imide, potassium N,N-di(fluorosulfonyl)imide or sodium N,N-di(fluorosulfonyl)imide is obtained.