A nanoimprint-mold release agent including an alkoxysilane compound represented by general formula (1) is provided
wherein Rf and Rf′ are each independently a fluoroalkyl group of 1 to 10 carbon atoms; R1 is a hydrogen atom or an aliphatic monovalent hydrocarbon group of 1 to 6 carbon atoms; R2 and R3 are each independently methyl group or ethyl group; X and Y are each independently an ether linkage or an ester linkage; a and b are each 0 or 1; m, n, and p are each an integer of 0 to 6; q is an integer of 1 to 6 and r is an integer of 0 to 2.
提供一种纳米压印模具脱模剂,其中包括一种由通式(1)表示的烷氧基
硅烷化合物,其中Rf和Rf'分别是1至10个碳原子的氟烷基基团;R1是氢原子或1至6个碳原子的脂肪烷基单价碳氢基团;R2和R3分别是甲基基团或乙基基团;X和Y分别是醚键或酯键;a和b分别为0或1;m、n和p分别为0至6的整数;q为1至6的整数,r为0至2的整数。