A material for an insulating film which comprises a copolymer obtained by reacting a polyamide having a specific structure and a reactive oligomer as a component forming the film; a coating varnish for an insulating film which comprises this material and an organic solvent; an insulating film which comprises a layer of a resin comprising as a main structure a polybenzoxazole which is obtained by treating the above material or the above coating varnish by heating so that condensation reaction and crosslinking reaction take place and has fine pores; and a semiconductor device which comprises an insulating interlayer film for multi-layer wiring comprising the insulating film and/or a surface protective film comprising the insulating film. Excellent electrical, thermal and mechanical properties are exhibited and a low permittivity can be achieved.
一种绝缘薄膜材料,包括由特定结构的聚酰胺和反应性低聚物作为成膜组分所反应得到的共聚物;一种用于绝缘薄膜的涂覆清漆,包括该材料和有机溶剂;一种绝缘薄膜,包括一层
树脂,其主要结构为通过热处理上述材料或上述涂覆清漆得到的聚
苯并咪唑,发生缩聚反应和交联反应并具有细小孔隙;以及一种半导体器件,包括用于多层布线的绝缘中间层膜,包括上述绝缘薄膜和/或表面保护膜,包括上述绝缘薄膜。具有优异的电性能、热性能和机械性能,并且可以实现低介电常数。