申请人:Rohm and Haas Electronic Materials LLC
公开号:EP2514799A1
公开(公告)日:2012-10-24
An aqueous acidic composition which includes alkaline compounds, fluoride ions and oxidizing agents is provided for texturing polycrystalline semiconductors. Methods for texturing are also disclosed. The textured polycrystalline semiconductors have reduced reflectance of light incidence.
提供了一种酸性水溶液组合物,其中包括碱性化合物、氟离子和氧化剂,用于多晶半导体的制绒。此外,还公开了制绒方法。经过制绒的多晶半导体可降低入射光的反射率。