SULFONIC-ESTER-CONTAINING COMPOSITION FOR FORMATION OF ANTIREFLECTION FILM FOR LITHOGRAPHY
申请人:Nissan Chemical Industries, Ltd.
公开号:EP1813987A1
公开(公告)日:2007-08-01
There is provided an anti-reflective coating forming composition for lithography comprising a polymer compound, a crosslinking compound, a crosslinking catalyst, a sulfonate compound and a solvent. The anti-reflective coating obtained from the composition has a high preventive effect for reflected light, causes no intermixing with photoresists, has a higher dry etching rate compared with photoresists, can form a photoresist pattern having no footing at the lower part, and can use in lithography process by use of a light such as ArF excimer laser beam and F2 excimer laser beam, etc.
本发明提供了一种用于光刻的抗反射涂层形成组合物,该组合物由聚合物化合物、交联化合物、交联催化剂、磺酸盐化合物和溶剂组成。由该组合物制得的抗反射涂层对反射光有很好的防止效果,不会与光刻胶混合,与光刻胶相比具有更高的干蚀刻率,可以形成下部无基底的光刻胶图案,并可在光刻工艺中使用 ArF 准分子激光束和 F2 准分子激光束等光源。