申请人:——
公开号:US20010018270A1
公开(公告)日:2001-08-30
The present invention relates to a slurry used for chemical mechanical polishing of a substrate having an insulating film and a tantalum-containing metal film formed on the insulting film, which slurry contains a silica abrasive and a polycarboxylic acid such as oxalic acid, malonic acid, tartaric acid, malic acid, glutaric acid, citric acid, maleic acid or the like. According to the present invention, a buried electric connection of high reliability and excellent electrical properties can be formed at a high polishing rate, i.e. at a high throughput with the generation of dishing and erosion being suppressed.
本发明涉及一种浆料,用于对具有绝缘膜和形成在侮辱膜上的含钽金属膜的基板进行化学机械抛光,该浆料含有硅磨料和聚羧酸,如草酸、丙二酸、酒石酸、苹果酸、戊二酸、柠檬酸、马来酸或类似物质。根据本发明,可以在高抛光率(即高产量)下形成具有高可靠性和优异电气性能的埋入式电连接,同时还能抑制碟形磨损和侵蚀的产生。