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作者:Chang, Chung-Cheng、Li, Mung-Dar、Chiang, Michael Y.、Peng, Shie-Ming、Wang, Yu、Lee, Gene-Hsiang
DOI:——
日期:——
Tris(dialkylamide)aluminum compound, and method for producing aluminum-containing thin film using same
申请人:UBE INDUSTRIES, LTD.
公开号:US09194041B2
公开(公告)日:2015-11-24
The present invention relates to a tris(dialkylamide)aluminum compound, and a method for producing an aluminum-containing thin film using the aluminum compound, the tris(dialkylamide)aluminum compound being represented by the formula (1):
wherein
R represents a linear alkyl group having 1 to 6 carbon atoms; and
R1, R2 and R3 may be the same as, or different from each other, and each independently represents hydrogen atom, or a linear or branched alkyl group having 1 to 6 carbon atoms, or R1, R2 and R3 may be joined together to form a ring,
with the proviso that the compounds in which two or more of R1, R2 and R3 are hydrogen atoms are excluded, and
three dialkylamide ligands may be the same as, or different from each other.
A series of N,N-dialkylcarbamates is synthesized by insertion of CO2 into Al−N bonds. Structural elucidation of these compounds was mainly performed by means of solid-state NMR spectroscopy (27Al and 13C). Insights into the insertion mechanism were obtained by in-situ IR and solution NMR spectroscopy conducted during the reaction. A partially hydrolyzed aluminum carbamate cluster was isolated and investigated
通过将 CO 2插入到 Al−N 键中,合成了一系列N , N -二烷基氨基甲酸酯。这些化合物的结构解析主要通过固态核磁共振光谱(27 Al和13 C)进行。通过在反应过程中进行的原位 IR 和溶液 NMR 光谱获得对插入机制的洞察。分离出部分水解的氨基甲酸铝簇并通过单晶 X 射线衍射进行研究。