申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20190204738A1
公开(公告)日:2019-07-04
A resist composition including a resin component whose solubility in a developing solution is changed due to the action of the acid, in which the resin component has a constitutional unit derived from a compound represented by Formula (a0-1) and a constitutional unit containing an acid decomposable group whose polarity is increased due to the action of the acid. In the formula, W represents a polymerizable group-containing group, Ya
0
represents a carbon atom, Xa
0
represents a group that forms a monocyclic aliphatic hydrocarbon group together with Ya
0
, some or all hydrogen atoms in the monocyclic aliphatic hydrocarbon group may be substituted with substituents, and Ra
00
represents an aromatic hydrocarbon group which may have a substituent.