CYCLIC COMPOUND, METHOD OF PRODUCING THE SAME, RADIATION SENSITIVE COMPOSITION, AND METHOD OF FORMING RESIST PATTERN
申请人:Hayashi Hiromi
公开号:US20120251947A1
公开(公告)日:2012-10-04
This invention addresses problems to provide a cyclic compound having a high solubility in safety solvents and a high sensitivity and being good in the shape of the resulting resist pattern, a method of producing the same, a radiation sensitive composition comprising the same, and a method of forming a resist pattern using the radiation sensitive composition. As means for solving the problem, there are provided a cyclic compound having a specific structure, a radiation sensitive composition comprising the compound, and a method of forming a resist pattern using the composition.
US8829247B2
申请人:——
公开号:US8829247B2
公开(公告)日:2014-09-09
[EN] CYCLIC COMPOUND, METHOD FOR PRODUCING SAME, RADIATION SENSITIVE COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN<br/>[FR] COMPOSÉ CYCLIQUE, SON PROCÉDÉ DE FABRICATION, COMPOSITION SENSIBLE AU RAYONNEMENT, ET PROCÉDÉ DE FORMATION D'UN MOTIF DE RÉSERVE