NONAQUEOUS ELECTROLYTE SOLUTION AND ENERGY DEVICE USING SAME
申请人:MITSUBISHI CHEMICAL CORPORATION
公开号:US20200274199A1
公开(公告)日:2020-08-27
The present invention provides an energy device having excellent properties. Also provided is a nonaqueous electrolyte solution containing a compound represented by the following Formula (1), wherein R
11
, R
12
and R
13
each independently represent an organic group having 1 to 3 carbon atoms; and R
11
and R
12
, R
11
and R
13
, or R
12
and R
13
are optionally bound with each other to form a 5-membered ring or a 6-membered ring, with a proviso that a total number of carbon atoms of R
11
, R
12
and R
13
is 7 or less.
COMPOSITION FOR FORMING RESIST UNDERLAYER FILM AND METHOD FOR FORMING PATTERN
申请人:MINEGISHI Shin-ya
公开号:US20120252217A1
公开(公告)日:2012-10-04
A resist underlayer film-forming composition includes (A) a polymer that includes a repeating unit shown by a formula (1), and has a polystyrene-reduced weight average molecular weight of 3000 to 10,000, and (B) a solvent,
wherein R
3
to R
8
individually represent a group shown by the following formula (2) or the like,
—O—R
1
≡R
2
(2)
wherein R
1
represents a single bond or the like, and R
2
represents a hydrogen atom or the like.
METHOD OF FORMING PATTERN AND COMPOSITION FOR FORMING OF ORGANIC THIN-FILM FOR USE THEREIN
申请人:Shimizu Daisuke
公开号:US20100233635A1
公开(公告)日:2010-09-16
A method for forming a pattern contains (1) a step of forming an underlayer film containing (A) a radiation-sensitive acid generator capable of generating an acid upon exposure to radiation rays or (B) a radiation-sensitive base generator capable of generating a base upon exposure to radiation rays on a substrate; (2) a step of irradiating the underlayer film with radiation rays through a mask with a predetermined pattern to obtain an exposed underlayer film portion having been selectively exposed through the predetermined pattern; (3) a step of forming (C) an organic thin film on the underlayer film so as to attain chemical bonding of the exposed underlayer film portion with the organic thin-film formed on the exposed underlayer film portion; and (4) a step of removing the organic thin film formed on areas of the underlayer film other than the exposed underlayer film portion.
RESIST UNDERLAYER FILM-FORMING COMPOSITION AND METHOD FOR FORMING PATTERN
申请人:Minegishi Shin-ya
公开号:US20120270157A1
公开(公告)日:2012-10-25
A resist underlayer film-forming composition includes a polymer including a structural unit shown by a formula (1), and having a polystyrene-reduced weight average molecular weight of from 3000 to 10000, and a solvent. Each of R
3
to R
8
independently represents a group shown by a formula (2), a hydrogen atom, a hydroxyl group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryl group having 6 to 14 carbon atoms, or a glycidyl ether group having 3 to 6 carbon atoms, wherein at least one of R
3
to R
8
represents the group shown by the formula (2).
A resist underlayer film-forming composition includes a polymer including a repeating unit shown by a formula (1), and having a polystyrene-reduced weight average molecular weight of 3000 to 10,000, and a solvent. Each of R
3
to R
8
individually represent a group shown by the following formula (2) or the like. R
1
represents a single bond or the like. R
2
represents a hydrogen atom or the like.