A finely patterned silica type ceramic film suitable as an inter-layer dielectric is formed in a short time by applying, onto a substrate, a positive working radiation sensitive polysilazane composition comprising a modified poly(sil sesquiazane) having a number average molecular weight of 100 to 100,000 and containing a basic constituent unit represented by the general formula: —[SiR
6
(NR
7
)
1.5
]— and other constituent units represented by the general formula: —[SiR
6
2
NR
7
]— and/or —[SiR
6
3
(NR
7
)
0.5
]— (R
6
and R
7
independently represent a hydrogen atom, a C
1-3
alkyl group or a substituted or unsubstituted phenyl group) in a ratio of 0.1 to 100 mol-% to said basic constituent unit, a photo acid generator and preferably a water-soluble compound as a shape stabilizer, then patternwise exposing the resultant coating film, subjecting the exposed part of the coating film to moistening treatment, developing it with an aqueous alkali solution, wholly exposing the coating film to light and moistening treatment again, followed by burning treatment.
通过在基底上涂敷一种正工作辐射敏感聚
硅氮烷组合物,可在短时间内形成一种适于作为层间电介质的精细图案化
二氧化硅型陶瓷膜,该组合物由改性聚(
硅烷)组成,其平均分子量为 100 至 100000,并含有由通式表示的基本组成单元:-[SiR
6
(NR
7
)
1.5
及其他由通式代表的组成单元:-[SiR
6
2
NR
7
]-和/或-[SiR
6
3
(NR
7
)
0.5
]- (R
6
和 R
7
分别代表一个氢原子、一个 C
1-3
烷基或取代或未取代的苯基)的比例为 0.1 至 100 摩尔-%、光酸发生器和优选的
水溶性化合物作为形状稳定剂,然后将得到的涂膜按图案进行曝光,将涂膜的曝光部分进行湿润处理,用碱
水溶液显影,将涂膜完全暴露在光线下并再次进行湿润处理,然后进行灼烧处理。