Tris(disubstituted amino)sulfonium perfluorocarbanion salts and process for their preparation.
三(二取代氨基)磺酸盐和其制备方法。
PREPARATION OF 2,2-BIS (FLUOROALKYL) OXIRANE AND PREPARATION OF PHOTOACID GENERATOR THEREFROM
申请人:SAGEHASHI Masayoshi
公开号:US20130005997A1
公开(公告)日:2013-01-03
A 2,2-bis(fluoroalkyl)oxirane (A) is prepared by reacting a fluorinated alcohol (1) with a chlorinating, brominating or sulfonylating agent under basic conditions to form an oxirane precursor (2) and subjecting the oxirane precursor to ring closure under basic conditions. R
1
and R
2
are fluoroalkyl groups, R
3
and R
4
are hydrogen or monovalent hydrocarbon groups, X is chlorine, bromine or —OSO
2
R
5
group, and R
5
is alkyl or aryl.
FLUORINATED MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20140114080A1
公开(公告)日:2014-04-24
A fluorinated monomer has formula (1) wherein R
1
is H, F, methyl or trifluoromethyl, R
2
and R
3
are H or a monovalent hydrocarbon group, R
4
to R
6
each are a monovalent fluorinated hydrocarbon group, A is a divalent hydrocarbon group, and k
1
is 0, 1 or 2. A polymer derived from the fluorinated monomer may be endowed with appropriate water repellency, water slip, acid lability and hydrolysis and is useful as an additive polymer in formulating a resist composition.
Group transfer polymerization employing tris(disubstituted
申请人:E. I. Du Pont de Nemours and Company
公开号:US04621126A1
公开(公告)日:1986-11-04
Tris(disubstituted amino)sulfonium perfluorocarbanion salts, process for their preparation and the use thereof as catalysts in group transfer polymerization.