Aminolysis of esters. I. Kinetics and mechanism in anhydrous dioxane
作者:A. Sami A. S. Shawali、Sydney S. Biechler
DOI:10.1021/ja00988a039
日期:1967.6.1
Study on the effect of diand trifluoromethyl groups on the baeyer-villiger reaction
作者:Tomoya Kitazume、Junichi Kataoka
DOI:10.1016/s0022-1139(96)03500-2
日期:1996.10
Case studies of the Baeyer-Villiger reaction applied to di- and trifluoromethylketone derivatives and the effect of the fluoromethyl groups on the Baeyer-Villiger reaction, are described.
PATTERN FORMING METHOD USING DEVELOPER CONTAINING ORGANIC SOLVENT AND RINSING SOLUTION FOR USE IN THE PATTERN FORMING METHOD
申请人:Kamimura Sou
公开号:US20110229832A1
公开(公告)日:2011-09-22
A pattern forming method, includes: (i) a step of forming a resist film from a resist composition for organic solvent-based development, the resist composition containing (A) a resin capable of increasing a polarity by an action of an acid to decrease a solubility in an organic solvent-containing developer and (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; (ii) an exposure step; (iii) a development step using an organic solvent-containing developer; and (iv) a washing step using a rinsing solution, wherein in the step (iv), a rinsing solution containing at least either the solvent S
1
or S
2
as defined in the specification is used.