申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20170305848A1
公开(公告)日:2017-10-26
A novel sulfonium salt having high sensitivity with respect to active energy rays, a photoacid generator including the sulfonium salt, and a photosensitive composition containing the photoacid generator. The sulfonium salt is represented by formula (a1). In the formula, R
1
and R
2
each independently represent the group that is represented by formula (a2) or an alkyl group that may be substituted by a halogen atom, R
1
and R
2
are bonded to each other and may form a ring with the sulfur atom within the formula, R
3
is the group represented by formula (a3) or the group represented by formula (a4), A
1
represents S or the like, X
−
represents a monovalent anion, and R
1
and R
2
are not both an alkyl group which may be substituted with a halogen atom. In formulas (a2) to (a4), the ring Z
1
represents an aromatic hydrocarbon ring, R
4
, R
6
, R
9
, and R
10
each represents a specific monovalent group, R
5
, R
7
, and R
8
each represents a specific divalent group, A
2
and A
3
each represents S or the like, m1 represents an integer of 0 or more, and n1 and n2 each represent 0 or more.
一种对活性能量射线具有高敏感度的新型磺鎓盐,包括该磺鎓盐的光酸发生剂以及含有该光酸发生剂的光敏组合物。该磺鎓盐由公式(a1)表示。在该公式中,R1和R2分别表示由公式(a2)表示的基团或可能被卤素原子取代的烷基基团,R1和R2彼此相连并且可以与公式中的硫原子形成环,R3表示由公式(a3)表示的基团或由公式(a4)表示的基团,A1表示S或类似物,X-表示一价阴离子,且R1和R2不同时为可能被卤素原子取代的烷基基团。在公式(a2)到(a4)中,环Z1表示芳香族碳氢环,R4、R6、R9和R10各自表示特定的一价基团,R5、R7和R8各自表示特定的二价基团,A2和A3各自表示S或类似物,m1表示0或更多的整数,n1和n2各自表示0或更多。